Microscopy of Semiconducting Materials 1993, Proceedings of the Royal Microscopical Society Conference held at Oxford University, 5-8 April 1993 Oxford, UK

These proceedings contain the invited and contributed papers from the international MSM conference and present the work of many leaders in the field. The papers provide information on the most up-to-date advances in semiconductor microscopy spanning both fundamental research areas and developments in device processing technologies. As the major forum for the presentation of worldwide research papers in this field, this volume will be essential reading for all researchers probing the characteristics of semiconducting materials.