Reports recent developments in polymer science and technology pertinent to microelectronics. Addresses such topics as photophysics and radiation physics and chemistry of polymers; photoresists, electron beam resists, and X-ray resists; insulating materials in microelectronics; photoresponsive materials; silicon-containing polymers; conducting polymers; and optoelectronic materials. Includes international contributions from both academia and industry.
| ISBN-13: | 9780841230552 |
| ISBN-10: | 0841230552 |
| Publisher: | American Chemical Society |
| Publication date: | 1995-05-05 |
| Edition description: | 1 |
| Pages: | 540 |
| Product dimensions: | Height: 6.21 Inches, Length: 9.13 Inches, Weight: 1.67330856858 Pounds, Width: 1.05 Inches |
| Author: | Ito, Hiroshi, Tagawa, Seiichi, Horie, Kazuyuki |
| Language: | en |
| Binding: | Hardcover |
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