This book describes the application of machine learning modelling approaches in atomic layer deposition and presents detailed information on modelling, optimization, and prediction of the behaviour and characteristics of ALD for improved process quality control.
| ISBN-13: | 9781032386737 |
| ISBN-10: | 1032386738 |
| Publisher: | CRC Press LLC |
| Publication date: | 2025-05-06 |
| Edition description: | 1 |
| Pages: | 354 |
| Author: | Oluwatobi Adeleke, Sina Karimzadeh, Tien-Chien Jen |
| Language: | en |
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