Silicon Front-End Junction Formation Technologies (Materials Research Society Symposia Proceedings)

Materials Research Society Symposium Proceedings -- Low Temperature Shallow Junction Formation For 70 Nm Technology Node And Beyond / John O. Borland -- Electromagnetic Induction Heating For The 70 Nm Node / Keith Thompson, John H. Booske, R.f. Cooper And Y.b. Gianchandani -- Study Of The Effects Of A Two-step Anneal On The End Of Range Defects In Silicon / Renata A. Camillo-castillo, Kevin S. Jones, Mark E. Law And Leonard M. Rubin -- The Effect Of Ge Content In Mbe Si[subscript (1-x)]ge[subscript (x)] On The Evolution Of {311} Defects / Robert Crosby, Jackie Frazer, K.s. Jones, M.e. Law, A. Nylandsted Larsen And J. Lundsgaard Hansen. Editors, Daniel F. Downey ... [et Al.]. Includes Bibliographical References And Index.