• Two-Dimensional Periodic Nanoscale Patterning of Solid Surfaces by Four-Beam Standing Wave Excimer Laser Lithography

Two-Dimensional Periodic Nanoscale Patterning of Solid Surfaces by Four-Beam Standing Wave Excimer Laser Lithography

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Overview

This book presents and discusses a promising technology for fabrication of the one- and two-dimensional nanoperiodic structures on the solid surfaces by direct two- and four-beam standing wave pulsed laser modification. This method being developed extensively at present is very promising for application in nanoelectronics, data storage, integrated optics, and is considered to be a promising alternative to X-ray lithography in a wide range of applications.

Product Details

ISBN-13: 9781616686741
ISBN-10: 161668674X
Publisher: Nova Science Publishers, Incorporated
Publication date: 2010
Edition description: UK ed.
Pages: 87
Product dimensions: Height: 8.75 Inches, Length: 5.75 Inches, Weight: 0.3747858454 Pounds, Width: 0.25 Inches
Author: D. O. Filatov
Language: en
Binding: Paperback

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