| ISBN-13: | 9780780329850 |
| ISBN-10: | 0780329856 |
| Publisher: | Inst. of Electrical and Electronics Engineers |
| Publication date: | 1996 |
| Pages: | 528 |
| Product dimensions: | Height: 11 Inches, Length: 8.5 Inches, Weight: 2.75 Pounds, Width: 1 Inches |
| Author: | Calif.) IEEE Workshop on Micro Electro Mechanical Systems (9th : 1996 : San Diego |
| Language: | en |
| Binding: | Paperback |
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