• Chemistry of Atomic Layer Deposition

Chemistry of Atomic Layer Deposition

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SKU SHUB236168
$89.22
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Get it by: Jul 12, 2026
Overview

This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

Product Details

ISBN-13: 9783110712513
ISBN-10: 3110712512
Publisher: Verlag Max Niemeyer
Publication date: 2022
Edition description: 1
Pages: 105
Product dimensions: Height: 9.61 Inches, Length: 6.69 Inches, Weight: 0.47178924068 Pounds, Width: 0.24 Inches
Author: Seán Thomas Barry
Language: en
Binding: Paperback

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