Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
| ISBN-13: | 9780852969069 |
| ISBN-10: | 0852969066 |
| Publisher: | IET |
| Publication date: | 1997 |
| Pages: | 776 |
| Product dimensions: | Height: 10.25 Inches, Length: 7.5 Inches, Weight: 1 Pounds, Width: 1.75 Inches |
| Author: | P. Rai-Choudhury |
| Language: | en |
| Binding: | Hardcover |
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