This is a comprehensive, up-to-date summary of the science, technology and manufacturing of semiconductor silicon materials by 10 experts in the field. Practical aspects such as materials handling, safety, and impurity and defect reduction are discussed; and a complete set of silicon based binary phase diagrams is included.
| ISBN-13: | 9788124205082 |
| ISBN-10: | 8124205086 |
| Publisher: | Crest Publishing House |
| Publication date: | 2005 |
| Pages: | 793 |
| Product dimensions: | Weight: 1.10231131 Pounds |
| Author: | William C. O'Mara, Robert B. Herring, Lee Philip Hunt |
| Language: | en |
| Binding: | Hardcover |
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