Explores the complex physical and chemical operations that are designed to build structures or modify properties of materials in very thin films. Covers fundamental phenomena occurring in unit processes used to manufacture integrated circuits. Examines the most significant fundamental manufacturing processes.
| ISBN-13: | 9780841209404 |
| ISBN-10: | 0841209405 |
| Publisher: | American Chemical Society |
| Publication date: | 1985-10-01 |
| Pages: | 360 |
| Product dimensions: | Height: 9 Inches, Length: 6 Inches, Width: 1 Inches |
| Author: | Stroeve, Peter |
| Language: | en |
| Binding: | Hardcover |
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