The proceedings of 18th International conference on Ion Implantation Technology (IIT2010) covers all aspect of ion implantation, from the fundamentals of ion-solid interactions to industrial applications of the latest implantation machines and device manufacturing.
| ISBN-13: | 9780735408760 |
| ISBN-10: | 0735408769 |
| Publisher: | American Inst. of Physics |
| Publication date: | 2011-01-25 |
| Edition description: | 2011 ed. |
| Pages: | 532 |
| Product dimensions: | Height: 11.25 Inches, Length: 8.75 Inches, Weight: 3.21 Pounds, Width: 1.25 Inches |
| Author: | Jiro Matsuo, Masataka Kase, Takaaki Aoki, Toshio Seki |
| Language: | en |
| Binding: | Hardcover |
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