• Laser and Particle-Beam Chemical Processing for Microelectronics: Volume 101 (MRS Proceedings)

Laser and Particle-Beam Chemical Processing for Microelectronics: Volume 101 (MRS Proceedings)

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Est. Date: Jan 7, 2026

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

  • Author(s): Daniel J. Ehrlich
  • Publisher: Cambridge University Press
  • Language: en
  • Pages: 536
  • Binding: Hardcover
  • Published: 1988-04-01
  • Dimensions: Height: 9.2 Inches, Length: 6.3 Inches, Weight: 1.9400679056 Pounds, Width: 1.5 Inches
  • Estimated Delivery: Jan 7, 2026
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