This volume includes selected papers based on the presentations given at Symposium O, "Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics," held at the April 25−29, 2011 MRS Spring Meeting in San Francisco, California. The symposium included topics relating to low-k dielectrics, integration, reliability, metallization, packaging and emerging technologies.
| ISBN-13: | 9781605113128 |
| ISBN-10: | 1605113123 |
| Publisher: | Materials Research Society |
| Publication date: | 2011-11-21 |
| Edition description: | 1 |
| Pages: | 140 |
| Product dimensions: | Height: 9.01573 Inches, Length: 5.98424 Inches, Weight: 0.771617917 Pounds, Width: 0.3751961 Inches |
| Author: | Mikhail R. Baklanov, Geraud Dubois, Christian Dussarrat, Terukazu Kokubo, Shinichi Ogawa |
| Language: | en |
| Binding: | Hardcover |
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