Microelectromechanical Systems: Concepts, Design and Analysis

Microelectromechanical systems (MEMS) refer to the technology of microscopic devices that consists of moving parts. It is made up of components, whose size ranges between 1 and 100 micrometers. It ideally consists of a microprocessor and different micro sensors. MEMS can be designed using modified semiconductor device fabrication technologies. Wet etching, dry etching, molding and plating, electro discharge machining are examples of such technologies. Ceramics, metals, silicon and polymers are some of the materials used in MEMS. Some of the basic processes of MEMS are deposition processes, patterning, etching processes and die preparation. This textbook provides comprehensive insights into the study of microelectromechanical systems. It is a compilation of chapters that discuss the most vital concepts with respect to the design and analysis of MEMS. It is an essential guide for both academicians and students who wish to pursue this discipline further.