This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
| ISBN-13: | 9783540002529 |
| ISBN-10: | 3540002529 |
| Publisher: | Springer Science & Business Media |
| Publication date: | 2003-06-13 |
| Edition description: | 2003 |
| Pages: | 270 |
| Product dimensions: | Height: 9.21258 Inches, Length: 6.14172 Inches, Weight: 2.7998707274 Pounds, Width: 0.6874002 Inches |
| Author: | Raja Nassar, Weizhong Dai |
| Language: | en |
| Binding: | Hardcover |
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