• Characterization of Plasma-Enhanced CVD Processes: Volume 165 (MRS Proceedings)

Characterization of Plasma-Enhanced CVD Processes: Volume 165 (MRS Proceedings)

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SKU SHUB170440
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Est. Date: Feb 19, 2026
Overview

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Product Details

ISBN-13: 9781558990531
ISBN-10: 1558990534
Publisher: Cambridge University Press
Publication date: 1990-09-05
Edition description: Illustrated
Pages: 270
Product dimensions: Height: 9.1 Inches, Length: 6 Inches, Weight: 1.1684499886 Pounds, Width: 0.9 Inches
Author: N/a
Language: en
Binding: Hardcover

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