POST-PROCESSING TECHNIQUES FOR INTEGRATED MEMS

The reduction of size in mechanical systems results in a dramatic decrease of power consumption and cost, while greatly improving performance and reliability. For this reason MEMS (microelectromechanical systems) has become of great interest to electrical engineers working in a wide range of application areas, from DNA analysis and medical applications, to digital projection displays and imaging, This cutting-edge book focuses on a the critical process of integrating MEMS with standard pre-processed electronics. It provides engineers, working in a variety of fields, with an innovative process and specific techniques for effectively achieving this integration and taking advantage of the many performance benefits of using MEMS technology in their systems.